Motion Control

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Micro-Edge Coater Dispenser

Substrate: PLP

Stage: Y-Axis (730mm)

X-Axis (980mm)

Z-Axis (50mm)

Header: Scanner, Vision

Stage: Y-Axis (550mm)

X-Axis (740mm)

Z-Axis (100mm)

T-Axis ( 5° )

Header: Dispensor, Vision

Fan-Out Panel level Packaging

Substrate size: 720mm X 610mm

Module: Wafer Stage, Gantry, Picker, Vision,

Cam Ejector, Gripper

Application: PR Spin Coater & Hot Plate

Substrate size: (W)200mm X (D)250mm

Work Size:

1200mm X 1400mm X 1T (0.3~1T) /

600mm X 500mm

Straight Cut / R Cut (>0.2mm)

since Dec. 24 ‘ 2012